HIGH-PRECISION LIGHT SPOT TEST SYSTEM AND METHOD BASED ON SPACE IMAGING SYSTEM

WIPO Patent Application WO/2024/065898

A1

A high-precision light spot test system and method based on a space imaging system. The test system comprises: a wide-spectrum light source (1), an optical fiber (2), a light source focusing lens (3), a Kohler lens (4), a beam splitter (5), a high-magnification objective lens (6), a sample (7), a six-axis carrier platform (8), a Fourier lens (9), an iris diaphragm (10), a secondary focusing lens (11), an imaging lens (12), a variable neutral density filter (13), a CCD camera (14), and a computer (15). During testing, the sample (7) is placed on the six-axis carrier platform (8); firstly, a light outlet is found by using a method for using wide-spectrum illumination light to form a reflected real image of the sample (7); then a far-field image of a light-emitting light spot of the sample (7) is projected onto the CCD camera (14) by means of Fourier imaging; and finally, data processing is performed on the image to obtain a divergence angle of the light spot of the sample, and then the size of the light spot is calculated. The system and method are suitable for light spot measurement of a micron-scale light emitting element, the measurement error is within 5%, and the test wavelength can cover visible light to a near-infrared band.

CHEN LIFENG (CN)
HU ZIYANG (CN)
YAN YANGJIE (CN)

PCT/CN2022/126157

April 04, 2024

October 19, 2022

Click for automatic bibliography generation  

LIOBATE TECH LIMITED (CN)

G01B11/00; G01B11/26; G01M11/02; G02B27/00

WO2006050978A2

2006-05-18

CN104634699A	2015-05-20
CN105953739A	2016-09-21
CN114778078A	2022-07-22
CN107702793A	2018-02-16
US5889593A	1999-03-30

NANJING ZHONGLIAN PATENT AGENCY CO., LTD. (CN)

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