Title:
HEATING DEVICE, AND TEMPERATURE ADJUSTING DEVICE PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2024/069757
Kind Code:
A1
Abstract:
Provided is a heating device that can efficiently heat a circulating fluid with high precision, and that can shorten the time required for temperature adjustment to enhance productivity in semiconductor manufacturing and the like; and a temperature adjusting device using the heating device. A heating device (26) heats a circulating fluid for adjusting the temperature of a control target, the heating device including: an electroconductive pipe (55) through which the circulating fluid flows; a primary coil (50) wound on the periphery of the pipe (55) and through which alternating current flows; and an electroconductive heating element (51) provided in a region of the pipe (55) where the primary coil (50) is wound. The heating element (51) generates heat by induction heating resulting from the alternating current of the primary coil (50), and the circulating fluid is heated by the heating element (51). Due to this configuration, the heat of the heating element (51) that generates heat by electromagnetic induction can be transferred directly to the circulating fluid, and the circulating fluid can be efficiently heated to a correct temperature. Thus, the time required for temperature adjustment can be shortened in semiconductor manufacturing and the like.
Inventors:
MUKAIYAMA HIROSHI (JP)
SATO HIROO (JP)
SATO HIROO (JP)
Application Number:
PCT/JP2022/035954
Publication Date:
April 04, 2024
Filing Date:
September 27, 2022
Export Citation:
Assignee:
ADTEX INC (JP)
International Classes:
H05B6/10
Foreign References:
| JP3222812U | 2019-08-29 | |||
| JP2014229811A | 2014-12-08 | |||
| JP2001284034A | 2001-10-12 | |||
| JP2013058441A | 2013-03-28 | |||
| JP2008292026A | 2008-12-04 | |||
| JP2013057482A | 2013-03-28 | |||
| JPH0735413A | 1995-02-07 | |||
| JP2004214039A | 2004-07-29 | |||
| JP3186718U | 2013-10-24 | |||
| JP2004183999A | 2004-07-02 | |||
| JP2010073655A | 2010-04-02 | |||
| JP2005351515A | 2005-12-22 | |||
| US20090126378A1 | 2009-05-21 |
Attorney, Agent or Firm:
OTAKE Masahisa (JP)
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