Title:
FULLY-DECOUPLED THREE-AXIS MEMS GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2024/060334
Kind Code:
A1
Abstract:
A fully-decoupled MEMS gyroscope, comprising an anchor point unit (1), a sensing unit (2) elastically connected to the anchor point unit (1), and a driving unit (3) driving the sensing unit (2) to move. The anchor point unit (1) comprises a central anchor point sub-unit (11) located at the central position of a rectangle and four side anchor points (12) respectively located between the central anchor point sub-unit (11) and the four corners of the rectangle. The driving unit (3) comprises four driving members (31) respectively located at four sides of the rectangle, an avoidance interval being formed between each two adjacent driving members (31), and each side anchor point (12) being respectively located in an avoidance interval. The sensing unit (2) comprises two X mass blocks (21) symmetrically arranged in two opposite avoidance intervals, two Y mass blocks (22) symmetrically arranged in the other two opposite avoidance intervals, four Z mass blocks (23) respectively located outside the driving members, and four Z measurement decoupling members (24) respectively located outside the Z mass blocks (23), wherein the X mass blocks (21) and the Y mass blocks (22) are respectively connected to the side anchor points (12). The fully-decoupled MEMS gyroscope uses differential driving, and thus can achieve differential measurement, thereby reducing orthogonal errors.
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Inventors:
MA ZHAO (CN)
YAN SHITAO (CN)
ZHAN ZHAN (CN)
KAN XIAO (CN)
YANG SHAN (CN)
PENG HONGTAO (CN)
LI YANG (CN)
LAI KAHKEEN (CN)
TAN QIUYU (CN)
YAN SHITAO (CN)
ZHAN ZHAN (CN)
KAN XIAO (CN)
YANG SHAN (CN)
PENG HONGTAO (CN)
LI YANG (CN)
LAI KAHKEEN (CN)
TAN QIUYU (CN)
Application Number:
PCT/CN2022/124697
Publication Date:
March 28, 2024
Filing Date:
October 11, 2022
Export Citation:
Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
G01C19/56
Foreign References:
| CN114719833A | 2022-07-08 | |||
| CN105606083A | 2016-05-25 | |||
| CN114719834A | 2022-07-08 | |||
| US20160341551A1 | 2016-11-24 | |||
| CN107328402A | 2017-11-07 | |||
| CN111578921A | 2020-08-25 | |||
| CN114964193A | 2022-08-30 |
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
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