Title:
FORCE-BALANCED MENISCAL DISPENSERS FOR DEPOSITING CRYSTALLINE LAYERS, AND METHODS OF PRINTING CRYSTALLINE PATTERNED FEATURES
Document Type and Number:
WIPO Patent Application WO/2023/049090
Kind Code:
A8
Abstract:
Dispensers for dispensing solutions, such as solutions containing a crystallizable component and solvent(s), onto substrates in a controlled manner. In some embodiments, a dispenser of the present disclosure includes an elongated slot and corresponding slot opening that cooperate with a substrate so that a solution forms a meniscus between the dispenser and the substrate. The dispenser further includes a force-balancing reservoir containing wetting structures that interact with the solution to balance forces, for example, that would cause the solution to flow out of the slot when such flow is not desired. Methods of writing crystalline features, such as features of semiconductor devices, onto a substrate are also disclosed. In some embodiments, methods of the present disclosure involve strategically locating, on the substrate, regions that are either hydrophobic or hydrophilic to the relevant solution to define feature regions where the features will form.
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Inventors:
HEADRICK RANDALL (US)
MILLER RICHARDS (US)
MILLER RICHARDS (US)
Application Number:
PCT/US2022/044062
Publication Date:
April 18, 2024
Filing Date:
September 20, 2022
Export Citation:
Assignee:
THE UNIV OF VERMONT AND STATE AGRICULTURAL COLLEGE (US)
International Classes:
H01L21/02; B05B12/08; C30B7/00; C30B29/54
Attorney, Agent or Firm:
HELLER, Morgan, S., II (US)
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