Title:
FILM FORMING APPARATUS, METHOD FOR DRIVING FILM FORMING APPARATUS, AND FILM FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/095690
Kind Code:
A1
Abstract:
The present invention provides: a film forming apparatus which is capable of having a substrate sucked onto a suction member in a stable state; a method for driving a film forming apparatus; and a film forming method. A film forming apparatus according to the present invention is characterized by comprising: an electrostatic chuck 31 that sucks a surface of a substrate, the surface being on the reverse side of the film formation-side surface thereof; a first support member 41 that supports the peripheral edge of the substrate before and/or after the suction of the substrate onto the electrostatic chuck 31; a second support member 71 that extends in a first direction along the film formation-side surface of the substrate and supports the film formation-side surface of the substrate; and a first drive unit that slides the second support member 71 in the first direction.
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Inventors:
KASE SYOUYA (JP)
FUJIMOTO YOUSUKE (JP)
SATO NORIYASU (JP)
FUJIMOTO YOUSUKE (JP)
SATO NORIYASU (JP)
Application Number:
PCT/JP2023/036349
Publication Date:
May 10, 2024
Filing Date:
October 05, 2023
Export Citation:
Assignee:
CANON TOKKI CORP (JP)
International Classes:
C23C14/50; C23C14/04; H01L21/683; H10K71/16
Foreign References:
| JP2022131449A | 2022-09-07 | |||
| JP2019099910A | 2019-06-24 | |||
| JP2019060027A | 2019-04-18 | |||
| JP2014065959A | 2014-04-17 | |||
| JP2022083681A | 2022-06-06 | |||
| JP2022008796A | 2022-01-14 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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