Title:
FILM FORMATION DEVICE, METHOD FOR DRIVING FILM FORMATION DEVICE, AND FILM FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/095718
Kind Code:
A1
Abstract:
Provided are: a film formation device capable of suctioning a substrate in a stable state to a suctioning member; a method for driving the film formation device; and a film formation method. The film formation device comprises: an electrostatic chuck 31 that suctions the surface of a substrate on the side reverse of the film formation-side surface of the substrate; a first support member 41 that supports the peripheral edge of the substrate before and/or after the suctioning of the substrate to the electrostatic chuck 31; and a pressing member 71 that is configured so as to be movable in a first direction intersecting the film formation-side surface of the substrate and that presses the peripheral edge of the substrate from the side of the substrate reverse of the film formation-side surface, said film formation device being characterized in that the pressing member 71, in a state of being separated from the substrate, overlaps the substrate when viewed in the first direction and is in a position farther away from the substrate than a suctioning surface of the electrostatic chuck 31.
Inventors:
KASE SYOUYA (JP)
SATO NORIYASU (JP)
SATO NORIYASU (JP)
Application Number:
PCT/JP2023/036762
Publication Date:
May 10, 2024
Filing Date:
October 10, 2023
Export Citation:
Assignee:
CANON TOKKI CORP (JP)
International Classes:
C23C14/50; C23C14/04; H01L21/683; H10K50/10; H10K71/16
Foreign References:
| JP2018197361A | 2018-12-13 | |||
| JP2019197865A | 2019-11-14 | |||
| JP2020077873A | 2020-05-21 | |||
| JP2021080562A | 2021-05-27 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
Download PDF: