Title:
EXCIMER LAMP AND LIGHT IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/044468
Kind Code:
A1
Abstract:
Provided is an excimer lamp with improved luminance. The excimer lamp includes a discharge container having sealed therein a first gas comprising krypton (Kr) or xenon (Xe), a second gas including chlorine atoms (Cl) or bromine atoms (Br), and a third gas that is at least one gas selected from the group consisting of argon (Ar), neon (Ne), and helium (He) and that exhibits a total gas partial pressure Pb equal to or greater than the gas partial pressure Plg of the first gas.
Inventors:
YAGYU HIDEAKI (JP)
Application Number:
PCT/JP2021/020818
Publication Date:
March 03, 2022
Filing Date:
June 01, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J61/16; H01J65/00
Foreign References:
| JPH08212982A | 1996-08-20 | |||
| JPH06209131A | 1994-07-26 | |||
| JPH10326597A | 1998-12-08 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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