Title:
ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEVICE, AND POSITIONING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/054535
Kind Code:
A1
Abstract:
Provided are an electron gun, an electron gun component, an electron beam application device, and a positioning method which make it possible to align the emission axis of an electron beam with the optical axis of an electron optics system of a partner-side device, even if there is a large shift in setting position during setting of an electron gun in a partner-side device. Provided is an electron gun, said electron gun comprising a light source, a vacuum chamber, a photocathode that emits an electron beam in accordance with received light from the light source, an electrode kit, and an electrode kit driving device, wherein: the electrode kit includes a photocathode receiving unit, and an anode that is disposed so as to be spaced from the photocathode receiving unit; the photocathode is placed on the photocathode receiving unit; and the electrode kit driving device moves the electrode kit in an X-Y plane, where the X direction is one direction, the Y direction is orthogonal to the X direction, and the X-Y plane includes the X direction and Y direction.
Inventors:
NISHITANI TOMOHIRO (JP)
Application Number:
PCT/JP2021/030504
Publication Date:
March 17, 2022
Filing Date:
August 20, 2021
Export Citation:
Assignee:
PHOTO ELECTRON SOUL INC (JP)
International Classes:
H01J3/02; H01J37/04; H01J37/073
Domestic Patent References:
| WO2019221119A1 | 2019-11-21 |
Foreign References:
| JP2018181403A | 2018-11-15 | |||
| US20070228286A1 | 2007-10-04 | |||
| JP6466020B1 | 2019-02-06 | |||
| JP6679014B1 | 2020-04-15 | |||
| JP2002313273A | 2002-10-25 | |||
| JPS537779B1 | 1978-03-22 | |||
| JP6466020B1 | 2019-02-06 | |||
| JPH0379014B2 | 1991-12-17 |
Other References:
See also references of EP 4120312A4
Attorney, Agent or Firm:
MATSUMOTO Seiji (JP)
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