Title:
ELECTRON GUN, ELECTRON BEAM APPLICATION DEVICE, METHOD FOR VERIFYING EMISSION AXIS OF ELECTRON BEAM EMITTED FROM PHOTOCATHODE, AND METHOD FOR ALIGNING EMISSION AXIS OF ELECTRON BEAM EMITTED FROM PHOTOCATHODE
Document Type and Number:
WIPO Patent Application WO/2021/059918
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing an electron gun with which it is possible to verify whether or not an electron beam emitted from a photocathode deviates from a design central axis of emission. The problem can be solved by an electron gun including a light source, a photocathode for emitting an electron beam upon receiving light from the light source, and an anode, the electron gun including an intermediate electrode disposed between the photocathode and the anode, an electron beam screening member capable of screening a portion of the electron beam, a measurement part for measuring the intensity of the electron beam screened by the electron beam screening member, and an electron beam emission direction deflection device disposed between the anode and the electron beam screening member and used for changing the position at which the electron beam passing through the anode reaches the electron beam screening member, wherein the intermediate electrode has an electron beam through-hole through which the electron beam emitted from the photocathode passes, and a drift space which can ignore the influence of an electric field formed between the photocathode and the anode by the application of voltage is formed in the electron beam through-hole.
Inventors:
IIJIMA HOKUTO (JP)
Application Number:
PCT/JP2020/033515
Publication Date:
April 01, 2021
Filing Date:
September 04, 2020
Export Citation:
Assignee:
PHOTO ELECTRON SOUL INC (JP)
International Classes:
H01J3/02; H01J1/34; H01J3/26; H01J9/42; H01J37/04; H01J37/073
Domestic Patent References:
| WO2018186294A1 | 2018-10-11 |
Foreign References:
| JP6466020B1 | 2019-02-06 | |||
| JP2004134300A | 2004-04-30 | |||
| JP2001143648A | 2001-05-25 | |||
| JP5394763B2 | 2014-01-22 | |||
| JP2010125467A | 2010-06-10 | |||
| JPS537779B1 | 1978-03-22 | |||
| JP6466020B1 | 2019-02-06 | |||
| JP2019150764A | 2019-09-12 |
Other References:
See also references of EP 4036953A4
Attorney, Agent or Firm:
MATSUMOTO Seiji (JP)
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