Title:
ELECTRON BEAM GENERATOR AND X-RAY GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/210255
Kind Code:
A1
Abstract:
According to the present invention, an electron gun comprises a cathode that has a tip for emitting an electron beam, a first electrode that accommodates a portion including the tip of the cathode, and a second electrode that surrounds the first electrode when viewed from a direction along the emission axis of the electron beam. The first electrode has a first side wall that surrounds the portion including the tip around the emission axis. The second electrode has a second side wall that is separated from the first side wall and surrounds the first side wall. The first side wall is provided with a first opening that communicates a first space surrounded by the first side wall with a second space between the first side wall and the second side wall. The second electrode is provided with a second opening that is opened in a direction along the emission axis so as to communicate the second space with an external space.
Inventors:
YABUSHITA RYOSUKE (JP)
ISHII ATSUSHI (JP)
ISHII ATSUSHI (JP)
Application Number:
PCT/JP2021/005318
Publication Date:
October 21, 2021
Filing Date:
February 12, 2021
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J3/02; H01J35/06
Foreign References:
| JP2009231102A | 2009-10-08 | |||
| JPS5416968A | 1979-02-07 | |||
| JPH08222161A | 1996-08-30 | |||
| JP2013232308A | 2013-11-14 | |||
| JP2015041585A | 2015-03-02 |
Other References:
See also references of EP 4134998A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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