Title:
ELECTROCHEMICAL MECHANICAL POLISHING AND PLANARIZATION SYSTEM FOR CMP EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2024/094145
Kind Code:
A1
Abstract:
Disclosed in the present invention is an electrochemical mechanical polishing and planarization system for CMP equipment, comprising: power supplies each provided with a first electrode and a second electrode; polishing heads connected to a rotating support, respectively connected to the first electrodes of the power supplies, and having conductivity; polishing tables correspondingly arranged below the rotating support, provided with conductive chemical liquid, and respectively connected to the second electrodes of the power supplies; and a switching unit used for, when the rotating support drives the polishing heads to rotate, switching and connecting the polishing heads and the polishing tables vertically corresponding to each other, so as to form an energized loop among the second electrodes, the polishing tables, the conductive chemical liquid, conductive wafer substrates, the polishing heads, and the first electrodes, and form an electrochemical reaction layer on a polishing surface of each conductive wafer substrate. The polishing heads can drive the conductive wafer substrates to move relative to the polishing tables, so as to achieve chemical mechanical polishing of the electrochemical reaction layers. According to the present invention, the removal rate and the polishing/planarization speed of a substrate material are improved, and the operation cost is reduced; and the present invention is suitable for equipment in which the number of polishing heads is inconsistent with the number of polishing tables.
Inventors:
ZHANG MINGQI (CN)
ZHOU YUANPENG (CN)
ZHOU YUANPENG (CN)
Application Number:
PCT/CN2023/129483
Publication Date:
May 10, 2024
Filing Date:
November 03, 2023
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
B24B37/10
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (Building 1 Yingbin Tongji Center, Nanyuan Street, Yuhang Distric, Hangzhou Zhejiang 9, CN)
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