Title:
ELECTRO-OPTICAL TEST PLATFORM DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/066108
Kind Code:
A1
Abstract:
An electro-optical test platform device, applicable to the technical field of electro-optical experiments. The device comprises: an electron gun (1), a vacuum chamber (2), a liner tube (4) and carrier disks (5); the electron gun (1) generates an electron beam; an objective lens (3), an electron beam imaging system and an electron beam size measurement device are arranged at the vacuum chamber (2); one end of the liner tube (4) is connected to the electron gun (1), the liner tube (4) is configured to allow an electron beam to pass through, and the other end of the liner tube (4) is communicated with the vacuum chamber (2); the electron beam imaging system uses secondary electron and backscattered electron signals to form an image; an etching trace is formed on a photoresist under the action of the electron beam; the size of the electron beam is obtained by measuring the etching trace; at least two carrier disks (5) are provided, the carrier disks (5) move along the length direction of the liner tube (4), and the carrier disks (5) are used for bearing electro-optical elements. The device solves the technical problems in the prior art that electro-optical elements can only be independently tested, collected and analyzed data is limited, and even if one electro-optical system is formed for testing, waste and low efficiency are also present when modification is required.
Inventors:
HUANG LONG (CN)
ZHANG LIUJING (CN)
ZHANG ZHENSHENG (CN)
YU DAPENG (CN)
ZHANG LIUJING (CN)
ZHANG ZHENSHENG (CN)
YU DAPENG (CN)
Application Number:
PCT/CN2022/143433
Publication Date:
April 04, 2024
Filing Date:
December 29, 2022
Export Citation:
Assignee:
UNIV SOUTHERN SCI & TECH (CN)
SHENZHEN INT QUANTUM ACADEMY IQA (CN)
SHENZHEN INT QUANTUM ACADEMY IQA (CN)
International Classes:
G01N23/2251
Domestic Patent References:
| WO2021165114A1 | 2021-08-26 |
Foreign References:
| JP2011249273A | 2011-12-08 | |||
| CN106770405A | 2017-05-31 | |||
| CN113471042A | 2021-10-01 | |||
| CN108780729A | 2018-11-09 | |||
| CN109298001A | 2019-02-01 | |||
| CN111108579A | 2020-05-05 | |||
| JP2007305499A | 2007-11-22 | |||
| JP2000232052A | 2000-08-22 |
Other References:
CHENG-DAN HE: "Design of electron optical system for electron gun for electron beam welding", JOURNAL OF LANZHOU UNIVERSITY OF TECHNOLOGY, vol. 30, no. 5, 1 January 2004 (2004-01-01), pages 5 - 8, XP093153280, ISSN: 1673-5196
Attorney, Agent or Firm:
SHENZHEN ZHONGYI UNION INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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