Title:
ELASTIC WAVE DEVICE AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2023/204245
Kind Code:
A1
Abstract:
An elastic wave device 10 comprises: a support member 20 having an energy confinement layer (for example, a cavity 21) on one main surface; a piezoelectric layer 30 provided to the one main surface of the support member 20 so as to cover the energy confinement layer; a functional electrode 32 that is provided to at least one main surface of the piezoelectric layer 30 and at least partially overlaps with the energy confinement layer when viewed from the thickness direction of the piezoelectric layer 30; and a dielectric film 40 provided to the main surface of the piezoelectric layer 30 on the opposite side from the energy confinement layer. The piezoelectric layer 30 comprises a functional electrode section 31A to which the functional electrode 32 is provided and a part 31B other than the functional electrode section. The dielectric film 40 is provided at least to the functional electrode section 31A. The thickness of at least part of the dielectric film 40 provided to the functional electrode section 31A is greater than the thickness of the dielectric film 40 provided to the part 31B other than the functional electrode section.
Inventors:
MIMURA MASAKAZU (JP)
Application Number:
PCT/JP2023/015606
Publication Date:
October 26, 2023
Filing Date:
April 19, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H3/02; H03H3/08; H03H9/17; H03H9/25
Domestic Patent References:
| WO2005076473A1 | 2005-08-18 |
Foreign References:
| JP2018026735A | 2018-02-15 | |||
| JP2020014088A | 2020-01-23 | |||
| US20210119595A1 | 2021-04-22 | |||
| JP2015170931A | 2015-09-28 |
Attorney, Agent or Firm:
WISEPLUS IP FIRM (JP)
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