Title:
EDDY-CURRENT END-POINT DETECTION APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO/2024/078567
Kind Code:
A1
Abstract:
Disclosed in the present invention is an eddy-current end-point detection apparatus. The apparatus comprises: a plurality of resonant circuits which are connected in series, wherein each resonant circuit generates a set frequency; a magnetic core, wherein inductance coils of all the resonant circuits are wound around the magnetic core, and according to a thickness threshold value of a metal film, a corresponding resonant circuit is selected to generate a target frequency, and the target frequency acts on the surface of the metal film; a detection unit, which is used for acquiring a first voltage signal at two ends of all the resonant circuits connected in series, and a second voltage signal at two ends of any resonant circuit; and a processing unit, which is used for calculating and acquiring the thickness of the metal film according to a detection voltage signal acquired by the detection unit. Further disclosed in the present invention is an eddy-current end-point detection method. In the present invention, excitation coils and detection coils are combined into the same circuit, such that simplification of a detection apparatus and a detection method is realized; moreover, a plurality of resonant circuits are connected in series by means the coupling of a plurality of inductance coils, such that the output of different target frequencies can be realized, and detection is more flexible.
Inventors:
ZHOU YUANPENG (CN)
Application Number:
PCT/CN2023/124201
Publication Date:
April 18, 2024
Filing Date:
October 12, 2023
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
B24B37/013; B24B49/10; G01B7/06; G01N27/90
Foreign References:
| CN115319634A | 2022-11-11 | |||
| CN113959326A | 2022-01-21 | |||
| CN111830573A | 2020-10-27 | |||
| JP2011023579A | 2011-02-03 | |||
| KR20190142578A | 2019-12-27 | |||
| CN114536214A | 2022-05-27 | |||
| CN106152927A | 2016-11-23 |
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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