Title:
DEVICE AND METHOD FOR AUTOMATICALLY CONTROLLING CLEANING OF MEMS CHIP
Document Type and Number:
WIPO Patent Application WO/2024/031873
Kind Code:
A1
Abstract:
A device for automatically controlling cleaning of an MEMS chip, comprising a sampling detection assembly (88); an MEMS chip tray (3) and a spray cleaning assembly (86) which are arranged above the sampling detection assembly (88); a deionized water inlet (31) communicated with an inlet of the spray cleaning assembly (86); a drain port (89), an atomic absorption spectrophotometer (84) and a water tank (87) which are all communicated with a water outlet at the bottom of the sampling detection assembly (88), wherein the water inlet of the spray cleaning assembly (86), the deionized water inlet (31), an inlet of the water tank (87), and the water outlet of the sampling detection assembly (88) are provided with an electromagnetic valve and a micro pump, the electromagnetic valve is used for realizing on/off of a pipeline, and the micro pump is used for providing kinetic energy for the movement of a medium in the pipeline; and an acquisition controller (85) electrically connected to the electromagnetic valve and the micro pump. By means of automatic control and automatic testing of cleaning of an etched MEMS chip, the device greatly improves the cleaning effect and the cleaning efficiency of the MEMS chip, improves the yield, and reduces the production costs.
Inventors:
ZHANG NA (CN)
HE FANG (CN)
LI YONGQING (CN)
LI HONGRU (CN)
HU YANLI (CN)
LIU YAN (CN)
ZHU YONGFENG (CN)
JIA WENBO (CN)
SHAN HENAN (CN)
XU HAINING (CN)
HE FANG (CN)
LI YONGQING (CN)
LI HONGRU (CN)
HU YANLI (CN)
LIU YAN (CN)
ZHU YONGFENG (CN)
JIA WENBO (CN)
SHAN HENAN (CN)
XU HAINING (CN)
Application Number:
PCT/CN2022/134790
Publication Date:
February 15, 2024
Filing Date:
November 28, 2022
Export Citation:
Assignee:
SINOMACH SENSING TECH CO LTD (CN)
SHENYANG ACADEMY OF INSTRUMENTATION SCIENCE CO LTD (CN)
SHENYANG ACADEMY OF INSTRUMENTATION SCIENCE CO LTD (CN)
International Classes:
B08B3/02; B08B3/14; C02F1/469
Foreign References:
| CN109786210A | 2019-05-21 | |||
| CN114985361A | 2022-09-02 | |||
| JP2003145163A | 2003-05-20 | |||
| KR20110125507A | 2011-11-21 | |||
| US5511569A | 1996-04-30 |
Attorney, Agent or Firm:
CHINABLE IP (CN)
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