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Title:
DETECTION ELEMENT, PRODUCTION METHOD FOR DETECTION ELEMENT, AND DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/168040
Kind Code:
A1
Abstract:
A detection element comprising: a substrate having a first surface and a second surface facing the first surface and having provided therein a through-hole having different inner diameters at two locations in the thickness direction of the substrate; a through-electrode arranged in the through-hole; a first insulating layer arranged on the first surface side and having provided therein a first opening that exposes part of the through-electrode; a first electrode connected to the through-electrode via the first opening and being arranged upon the first insulating layer; a pattern electrode connected to the through-electrode and arranged on the second surface side; and a second electrode arranged upon the first insulating layer and arranged spaced apart from the first electrode.

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Inventors:
MOTOMURA TOMOHISA (JP)
SHIMADA OSAMU (JP)
OHIGASHI RYOICHI (JP)
Application Number:
PCT/JP2019/007599
Publication Date:
September 06, 2019
Filing Date:
February 27, 2019
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
G01T1/18; H01J47/04
Domestic Patent References:
WO2017061336A12017-04-13
Foreign References:
JP2013181800A2013-09-12
JP2002090465A2002-03-27
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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