Title:
CONTROL APPARATUS FOR TEMPERATURE OF CLEANING LIQUID IN WAFER CLEANING EQUIPMENT AND WAFER CLEANING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2023/098475
Kind Code:
A1
Abstract:
Disclosed in embodiments of the present application are a control apparatus for the temperature of a cleaning liquid in wafer cleaning equipment and the wafer cleaning equipment, used for solving the problems in the prior art that temperature control is not flexible and accurate enough when the temperature of the cleaning liquid is controlled, and a protective housing is heated to easily deform due to the fact that the heating temperature of the cleaning liquid is too high. The apparatus comprises a cooling sheet module, a control module, and a first temperature measurement device. The cooling sheet module is provided on the outer wall of a cleaning tank, and the cooling sheet module is flexibly controlled by means of the control module on the basis of the current temperature and the target temperature of the cleaning liquid in the cleaning tank, such that flexible switching between a heating function and a cooling function is achieved, and then the temperature of the cleaning liquid is flexibly controlled. Moreover, when a semiconductor cooling sheet in the cooling sheet module is in a working state, a certain temperature difference would be generated between a first sheet body and a second sheet body, such that the situation that a protective housing of the cleaning tank is heated to deform due to the fact that the heating temperature of the cleaning liquid is too high can be avoided, and the effect of cooling to protect the protective housing is achieved.
Inventors:
CHEN HAIXIANG (CN)
ZHANG MING (CN)
NAN JIANHUI (CN)
YANG BIN (CN)
ZHANG MING (CN)
NAN JIANHUI (CN)
YANG BIN (CN)
Application Number:
PCT/CN2022/132194
Publication Date:
June 08, 2023
Filing Date:
November 16, 2022
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/67; B08B3/10
Foreign References:
| CN114171436A | 2022-03-11 | |||
| CN108172533A | 2018-06-15 | |||
| CN111503935A | 2020-08-07 | |||
| CN113628949A | 2021-11-09 | |||
| JPH09105596A | 1997-04-22 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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