Title:
COMPATIBLE TANK STRUCTURE AND CLEANING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/021996
Kind Code:
A1
Abstract:
A compatible tank structure and a cleaning apparatus, the tank structure comprising an outer tank (100) and an inner tank (110), which is arranged inside the outer tank (100). The inner tank (110) comprises a bottom plate (113) and a side plate (112); the inner tank (110) is internally provided with a carrier (140), in which a workpiece is carried, and contains a solution therein, the solution being used for cleaning the workpiece; and the inner tank (110) is provided with an adjustment mechanism, the adjustment mechanism being used for adjusting the volume of the inner tank (110). By means of the provision of an adjusting baffle plate (120), under the condition of ensuring that the carrier (140) of a silicon wafer (141) is exactly submerged, the corresponding height of the carrier (140) in the inner tank (110) is matched, and different heights have corresponding overflow openings. When the carrier (140) is compatible with a relatively low height, all the overflow openings are opened; when the carrier (140) is compatible with a high height, the adjusting baffle plate (120) of the inner tank (110) blocks the lower overflow openings; and when the carrier (140) is compatible with a relatively high height, the adjusting baffle plate (120) of the inner tank (110) blocks all the overflow openings, and a liquid level in the inner tank is thus guaranteed.
Inventors:
ZUO GUOJUN (CN)
YU XINGMEI (CN)
DING LI (CN)
WAN HONGCHAO (CN)
YU XINGMEI (CN)
DING LI (CN)
WAN HONGCHAO (CN)
Application Number:
PCT/CN2023/104022
Publication Date:
February 01, 2024
Filing Date:
June 29, 2023
Export Citation:
Assignee:
CHANGZHOU S C EXACT EQUIP CO LTD (CN)
International Classes:
H01L21/67; B08B3/00; B08B3/04; B08B3/08; H01L21/00; H01L21/673; H01L21/683
Foreign References:
| CN217748362U | 2022-11-08 | |||
| CN101654809A | 2010-02-24 | |||
| CN208466692U | 2019-02-05 | |||
| CN213583712U | 2021-06-29 | |||
| CN201545936U | 2010-08-11 | |||
| CN112635616A | 2021-04-09 | |||
| CN114540960A | 2022-05-27 | |||
| CN206992064U | 2018-02-09 | |||
| JPH08215648A | 1996-08-27 | |||
| US20200211865A1 | 2020-07-02 | |||
| US6001191A | 1999-12-14 |
Attorney, Agent or Firm:
SHENZHEN KANGHONG INTELLECTUAL PROPERTY AGENT CO., LTD. (CN)
Download PDF: