Title:
CO-SPUTTERING RARE EARTH ROTATING TARGET MATERIAL, AND PREPARATION METHOD AND APPLICATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/051598
Kind Code:
A1
Abstract:
Embodiments of the present invention relate to a co-sputtering rare earth rotating target material, and a preparation method and an application method therefor. The co-sputtering rare earth rotating target material comprises two sections of end target tubes arranged at an axial end of the target material, and a plurality of sections of rare earth target tubes and a plurality of sections of co-sputtering target tubes which are arranged between the two sections of end target tubes and with a target material along an axial middle region, wherein the plurality of sections of rare earth target tubes are spaced apart from the plurality of sections of co-sputtering target tubes, and the target tubes are mutually assembled by means of welding; and the co-sputtering target tubes are selected from at least one of aluminum, copper, nickel, iron and praseodymium target tubes, and the end target tubes are non-rare earth target tubes or rare earth target tubes. In the technical solution provided by the embodiments of the present invention, the rare earth target tubes and the aluminum, copper and other co-sputtering element target tubes are combined on the same rotating target material, so that rare earth and co-sputtering elements are both attached to a surface of an NdFeB magnet, and the beneficial technical effects of shortening the grain boundary diffusion time and reducing the diffusion temperature can be achieved while the utilization rate and the sputtering efficiency of the rare earth target material are improved.
Inventors:
WANG ZHIQIANG (CN)
CHEN DEHONG (CN)
ZHONG JIAMIN (CN)
LI ZONGAN (CN)
YANG HONGBO (CN)
CHENG JUN (CN)
PANG SIMING (CN)
YANG BINGZHENG (CN)
WANG SHUANG (CN)
ZHANG YANLING (CN)
ZHANG XIAOQIANG (CN)
LIU DEZHONG (CN)
HAN LIGUO (CN)
CHEN DEHONG (CN)
ZHONG JIAMIN (CN)
LI ZONGAN (CN)
YANG HONGBO (CN)
CHENG JUN (CN)
PANG SIMING (CN)
YANG BINGZHENG (CN)
WANG SHUANG (CN)
ZHANG YANLING (CN)
ZHANG XIAOQIANG (CN)
LIU DEZHONG (CN)
HAN LIGUO (CN)
Application Number:
PCT/CN2023/116521
Publication Date:
March 14, 2024
Filing Date:
September 01, 2023
Export Citation:
Assignee:
GRIREM ADVANCED MAT CO LTD (CN)
GRIREM HI TECH CO LTD (CN)
GRIREM HI TECH CO LTD (CN)
International Classes:
C23C14/35; C23C14/16; C23C14/58; H01F41/02
Foreign References:
| CN115505885A | 2022-12-23 | |||
| CN114134470A | 2022-03-04 | |||
| CN108425096A | 2018-08-21 | |||
| CN110055503A | 2019-07-26 | |||
| CN213951331U | 2021-08-13 | |||
| US20100300877A1 | 2010-12-02 |
Attorney, Agent or Firm:
BEIJING CNCLOUD INTELLECTUAL PROPERTY LAW FIRM (CN)
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