Title:
CLEANING SYSTEM AND CLEANING METHOD USING SUPERCRITICAL FLUID
Document Type and Number:
WIPO Patent Application WO/2023/142257
Kind Code:
A1
Abstract:
Provided in the present invention are a cleaning system and cleaning method using a supercritical fluid. The system comprises a cleaning cavity and a supercritical cleaning fluid supply apparatus, wherein the cleaning cavity is used for accommodating a sample to be cleaned, with a cleaned liquid being adhered to at least part of the surface thereof; and the supercritical cleaning fluid supply apparatus supplies a cleaning fluid required for cleaning, drives the cleaning fluid to enter the cleaning cavity in a manner in which the pressure is increased to be higher than a supercritical pressure and the temperature is increased to be higher than a supercritical temperature, so as to clean said sample in an oscillating manner under the action of a fluctuation pressure, and drives a supercritical cleaning fluid to flow out of the cleaning cavity in a manner in which the pressure is decreased and is not lower than the supercritical pressure. In the present invention, the pressure of a cleaning fluid is changed, such that in the form of pressure fluctuation and in an oscillating manner, the cleaning fluid cleans a sample to be cleaned, the pressure-increasing process increases the speed of a supercritical cleaning fluid dissolving a cleaned liquid, and the pressure-decreasing process can bring out the cleaned liquid, thereby improving the cleaning efficiency; and the present invention is suitable for cleaning large-batch samples to be cleaned.
Inventors:
XIAO GANG (CN)
LIU YAFEI (CN)
JI YUXUAN (CN)
LIU YAFEI (CN)
JI YUXUAN (CN)
Application Number:
PCT/CN2022/083624
Publication Date:
August 03, 2023
Filing Date:
March 29, 2022
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
B08B3/10; B08B13/00
Foreign References:
| CN212703441U | 2021-03-16 | |||
| CN108356128A | 2018-08-03 | |||
| JP2005072568A | 2005-03-17 | |||
| CN103339316A | 2013-10-02 | |||
| JP3725629B2 | 2005-12-14 | |||
| CN106733945A | 2017-05-31 |
Attorney, Agent or Firm:
MY INTELLECTUAL PROPERTY FIRM (CN)
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