Title:
CANTILEVER MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2024/031961
Kind Code:
A1
Abstract:
Provided in the present invention is a cantilever microphone, comprising: a base plate; a cantilever, which comprises a rotor frame, a cover plate that covers the rotor frame, and a plurality of rotor comb fingers, the cantilever being provided with a first edge fixed to the base plate and a second edge opposite to the first edge, the plurality of rotor comb fingers being fixed to an edge of the end of the cover plate close to the second edge, and the rotor comb fingers being spaced apart from the rotor frame; and a stator, which is fixed to the base plate and comprises a plurality of stator comb fingers, wherein the stator comb fingers and the rotor comb fingers are alternately arranged and spaced apart from each other; and the rotor frame is made of at least one of polycrystalline silicon, silicon nitride, silicon oxide and silicon carbide. The cantilever microphone of the present invention can achieve both high mechanical sensitivity of the cantilever and high electrostatic sensitivity of the comb structure, thereby improving the performance or signal-to-noise ratio of the cantilever microphone.
Inventors:
KERVRAN YANNICK PIERRE (CN)
CARGILL SCOTT LYALL (CN)
CARGILL SCOTT LYALL (CN)
Application Number:
PCT/CN2023/078384
Publication Date:
February 15, 2024
Filing Date:
February 27, 2023
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/04
Foreign References:
| CN112954558A | 2021-06-11 | |||
| CN111051236A | 2020-04-21 | |||
| CN112261526A | 2021-01-22 | |||
| CN114157972A | 2022-03-08 | |||
| US20180192218A1 | 2018-07-05 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
Download PDF: