AUTOMATIC ASTIGMATISM ELIMINATION ELECTRONIC GUN, AND AUTOMATIC ASTIGMATISM ELIMINATION METHOD OF ELECTRONIC GUN

Title:

AUTOMATIC ASTIGMATISM ELIMINATION ELECTRONIC GUN, AND AUTOMATIC ASTIGMATISM ELIMINATION METHOD OF ELECTRONIC GUN

Document Type and Number:

WIPO Patent Application WO/2021/232659

Kind Code:

A1

Abstract:

Disclosed are an automatic astigmatism elimination electronic gun and an automatic astigmatism elimination method of an electronic gun. A split-type Rogowski coil is used as a detection element. In combination with pulsed electron beam technology, contactless detection for an electron beam spot shape is realized. The split-type Rogowski coil outputs a differential-mode signal, and takes the minimum value of a detection signal as a correction target of an astigmatism elimination device, such that a detection signal processing means is simplified and the influence of a common mode interference signal is also eliminated, thus improving the sensitivity and accuracy of detection. An excitation current of the "best" astigmatism elimination device is searched for in a split-axis mode, so as to realize fast searching. Weighted values of an amplitude value and an average value of the detection signal can reflect a difference in electron beam spot shapes more fully, and comprehensive data of the weighted values is used as a basis for determination; and confirmation of two rounds of searching for a "best" value further improves the reliability and reduces randomness.

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Inventors:

HUANG XIAODONG (CN)
WEI SHOUQI (CN)
FEI XIANG (CN)
ZHANG TONG (CN)
SU NAIBO (CN)
WANG BIN (CN)
DONG YANG (CN)
GUO WENMING (CN)
LIANG ZUMING (CN)
HUANG GUOHUA (CN)
TANG QIANG (CN)

Application Number:

PCT/CN2020/120391

Publication Date:

November 25, 2021

Filing Date:

October 12, 2020

Export Citation:

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Assignee:

GUILIN THD TECH CO LTD (CN)

International Classes:

H01J29/48; H01J29/56

Foreign References:

CN111477529A	2020-07-31
CN106340339A	2017-01-18
CN103143829A	2013-06-12

Other References: