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Title:
ARRAYED GRINDING METHOD BASED ON ACTIVE PRESSURE MODULATION
Document Type and Number:
WIPO Patent Application WO/2022/198739
Kind Code:
A1
Abstract:
An arrayed grinding method based on active pressure modulation, the method comprising: preparing grinding tools; performing measurement to obtain error distribution of a mirror to be processed, and calculating a residence time of a single grinding disk (28) according to grinding characteristics of the grinding tools under standard operating conditions; according to a spatial layout of the grinding tools, dividing a residence time table into sub-residence time tables without gaps in between, each grinding tool being responsible for processing a sub-region according to the sub-residence time table; generating, according to the sub-residence time tables, a path file for scanning sub-regions, and converting the residence time into residence pressure so as to generate a pressure control list; and putting the path file into a mirror scanning device for operation, and putting the pressure control list into a control system of the grinding tool for synchronous operation. By means of the method, small-diameter grinding tools are densely arranged so as to increase the effective grinding area; quantitative grinding is realized by means of active pressure modulation; and a mirror is divided into several sub-regions so as to increase processing parallelism, thereby improving processing efficiency.

Inventors:
ZHENG YI (CN)
LIANG BIN (CN)
LI YING (CN)
Application Number:
PCT/CN2021/089558
Publication Date:
September 29, 2022
Filing Date:
April 25, 2021
Export Citation:
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Assignee:
NANJING INSTITUTE OF ASTRONOMICAL OPTICS & TECH NATIONAL ASTRONOMICAL OBSERVATORIES CAS (CN)
International Classes:
B24B13/00; B24B27/00; B24B49/00; B24B49/16
Foreign References:
CN110948380A2020-04-03
CN111753409A2020-10-09
CN109866104A2019-06-11
CN108555729A2018-09-21
CN108356693A2018-08-03
US4523409A1985-06-18
Attorney, Agent or Firm:
NANJING ZHISHI LAW FIRM OF INTELLECTUAL PROPERTY (CN)
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