Title:
ANTENNA MODULE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/119833
Kind Code:
A1
Abstract:
Provided is an antenna module suitable for use in a signal frequency band from several tens of GHz to 100 GHz or more. The antenna module includes a substrate in which at least the uppermost surface is a single crystal of silicon carbide, a single crystal graphene layer provided in contact with the uppermost surface of the substrate, and a gallium nitride layer provided on the substrate. This antenna module is characterized in that an antenna element portion formed by patterning a region of the graphene layer that is not covered with the gallium nitride layer, an active element portion formed on the gallium nitride layer, and a connecting portion connecting the antenna element portion to the active element portion are formed integrally.
Inventors:
FUKIDOME HIROKAZU (JP)
SUEMITSU TETSUYA (JP)
WATANABE ISSEI (JP)
KAWAHARA MINORU (JP)
AKIYAMA SHOJI (JP)
TOBISAKA YUJI (JP)
KAWAI MAKOTO (JP)
SUEMITSU TETSUYA (JP)
WATANABE ISSEI (JP)
KAWAHARA MINORU (JP)
AKIYAMA SHOJI (JP)
TOBISAKA YUJI (JP)
KAWAI MAKOTO (JP)
Application Number:
PCT/JP2022/039252
Publication Date:
June 29, 2023
Filing Date:
October 21, 2022
Export Citation:
Assignee:
UNIV TOHOKU (JP)
NAT INST INF & COMM TECH (JP)
SHINETSU CHEMICAL CO (JP)
NAT INST INF & COMM TECH (JP)
SHINETSU CHEMICAL CO (JP)
International Classes:
H01Q23/00; C01B32/184; H01L21/338; H01L29/778; H01L29/812; H01P11/00; H01Q1/38
Domestic Patent References:
| WO2018051739A1 | 2018-03-22 |
Foreign References:
| US20140158987A1 | 2014-06-12 | |||
| JP2016021456A | 2016-02-04 |
Other References:
FUKIDOME HIROKAZU: "Creation of Affordable Manufacturing Processes of Ultrahigh-quality Graphene Growth and High-frequency Graphene Devices by Using Single-crystalline SiC Thin Films on Device-type Substrates", VACUUM AND SURFACE SCIENCE, THE JAPAN SOCIETY OF VACUUM AND SURFACE SCIENCE, vol. 64, no. 7, 10 July 2021 (2021-07-10), pages 318 - 323, XP093073274, ISSN: 2433-5835, DOI: 10.1380/vss.64.318
Attorney, Agent or Firm:
ORISAKA Shigeki (JP)
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