Title:
ALKALI CORROSION ADJUVANT FOR CLEANING WINDING-PLATED POLYSILICON AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/262340
Kind Code:
A1
Abstract:
Disclosed are an alkali corrosion adjuvant for cleaning winding-plated polysilicon and an application thereof. Components, in percentage by mass, in the alkali corrosion adjuvant are: 2%-5% of polyether, 1%-2.5% of an anionic surfactant, 1%-2.5% of a dispersing agent, and the balance of deionized water. According to the present invention, an alkali corrosion liquid formulated with the alkali corrosion adjuvant, instead of acid corrosion or TMAH, is used to remove winding-plated polysilicon, thereby improving product yield and reducing chemical cost; moreover, the present invention does not cause environmental protection problems such as nitrogen emission and is not harmful to a human body. The alkali corrosion adjuvant has selective adsorption and corrosion-inhibiting effects, and can corrode to remove polysilicon winding-plated on an edge while protecting a pyramid structure from being damaged. The present invention features a wide process window and stable efficiency, is applicable to various devices such as a groove type machine and a chain type machine, and thus facilitates mass production on a production line by using an existing machine.
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Inventors:
DENG YUWEI (CN)
PEI YINQIANG (CN)
CHEN PEILIANG (CN)
PEI YINQIANG (CN)
CHEN PEILIANG (CN)
Application Number:
PCT/CN2022/081379
Publication Date:
December 22, 2022
Filing Date:
March 17, 2022
Export Citation:
Assignee:
CHANGZHOU SHICHUANG ENERGY CO LTD (CN)
International Classes:
C09K13/02; H01L31/18
Foreign References:
| CN113416547A | 2021-09-21 | |||
| CN106676636A | 2017-05-17 | |||
| CN110416359A | 2019-11-05 | |||
| CN105177719A | 2015-12-23 | |||
| CN111785809A | 2020-10-16 | |||
| CN104562011A | 2015-04-29 | |||
| CN103681958A | 2014-03-26 | |||
| CN103614249A | 2014-03-05 | |||
| KR20180026855A | 2018-03-14 |
Attorney, Agent or Firm:
SUZHOU MAMBO PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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