Title:
【発明の名称】放電洗浄装置
Document Type and Number:
Japanese Patent JP2574852
Kind Code:
B2
Inventors:
UEDA SHINJIRO
ITO AKIKO
AKIBA MASAKUNI
NAKAMURA HIROSHI
ITO AKIKO
AKIBA MASAKUNI
NAKAMURA HIROSHI
Application Number:
JP4438488A
Publication Date:
January 22, 1997
Filing Date:
February 29, 1988
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B01J3/00; B01J19/08; B08B7/00; C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): B01J19/08; C23F4/00; H01L21/3065
Domestic Patent References:
| JP63277777A | ||||
| JP5572039A | ||||
| JP62160138A | ||||
| JP631435A | ||||
| JP62145570U |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)