Title:
ガスレーザ装置及び磁気軸受制御方法
Document Type and Number:
Japanese Patent JP6937823
Kind Code:
B2
Abstract:
A gas laser apparatus includes: a magnetic bearing including an electromagnet capable of controlling a magnetic force, and configured to rotatably support a rotary shaft of a fan in a magnetically levitated state by the magnetic force, the fan being configured to supply a laser gas; an electromagnet control unit configured to control the magnetic force of the electromagnet based on displacement of a levitated position of the rotary shaft and adjust the levitated position; a motor configured to generate torque for rotating the fan; a magnetic coupling configured to couple the rotary shaft and a drive shaft of a motor with a magnetic attractive force and transmit the torque of the motor to the rotary shaft; an attractive force estimating sensor configured to detect a parameter that enables an attractive force of the magnetic coupling to be estimated; an attractive force measuring unit configured to measure the attractive force of the magnetic coupling based on the detected parameter; and a correction unit configured to correct the magnetic force of the electromagnet according to a variation in the attractive force measured by the attractive force measuring unit.
Inventors:
Masaharu Miki
Wakabayashi Osamu
Wakabayashi Osamu
Application Number:
JP2019513121A
Publication Date:
September 22, 2021
Filing Date:
April 18, 2017
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H01S3/036; F16C32/04; F16D7/02
Domestic Patent References:
| JP2000216460A | ||||
| JP2002204013A | ||||
| JP2005036973A | ||||
| JP2001027238A | ||||
| JP2014082243A | ||||
| JP2010209691A | ||||
| JP2010113192A |
Foreign References:
| WO2016143135A1 | ||||
| US20130328455 |
Attorney, Agent or Firm:
Hosaka Enju