Title:
FORMING METAL THIN FILM
Document Type and Number:
Japanese Patent JPH06283446
Kind Code:
A
Abstract:
PURPOSE: To highten film formation speed of a metal thin film while improving productivity of the metal thin film.
CONSTITUTION: Liquid DMAH 1 is put into a bubbler 2 made of a stainless steel, H2 gas is mixed with this DMAH 1 so as to generate DMAH gas. At this time, liquid DMAH 1 is settled at a temperature in the range of 35 to 100°C by an oil bath 3. Generated DMAH gas is supplied to a CVD reaction furnace 9 through the piping 6. An Al alloy metal thin film performs chemical gaseous phase growth by this raw material gas supply in the reaction furnace 9.
Inventors:
YAMAMOTO HIROSHI
KONDO HIDEKAZU
TAKEYASU NOBUYUKI
KATAGIRI TOMOHARU
OOTA TOMOHIRO
KONDO HIDEKAZU
TAKEYASU NOBUYUKI
KATAGIRI TOMOHARU
OOTA TOMOHIRO
Application Number:
JP7191493A
Publication Date:
October 07, 1994
Filing Date:
March 30, 1993
Export Citation:
Assignee:
KAWASAKI STEEL CO
International Classes:
H01L21/205; H01L21/3205; H01L23/52; (IPC1-7): H01L21/205; H01L21/3205
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)