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Patent Searching and Data


Title:
CLEAVAGE PLANE FORMING DEVICE, CLEAVAGE PLANE FORMING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JP2003347240
Kind Code:
A
Abstract:

To prevent a thin film from being unexpectedly deposited on a cleavage plane when a cleavage operation is carried out for the formation of a semiconductor element.

Second crystal fixing members 9 and 10 are arranged in a region on a pad 8 so as to pinch a semiconductor crystal 11 between them in a lower region, and the lower region of the semiconductor crystal 11 is fixed between the second crystal fixing members 9 and 10. The bottom of an L-shaped movable unit 13 is arranged on the other region of the pad 8. A movable unit fixing member 18 is arranged on the movable unit 13 so as to fix the movable unit 13 on the pad 8 with a third screw 19. The upper region of the semiconductor crystal 11 is fixed so as to move together with the movable unit 13. The movable unit 13 contains a shape memory alloy, and the shape memory alloy has previously memorized a certain shape and furthermore has previously undergone treatment for removing a mixture contained inside at high temperatures.


Inventors:
HAMAKAWA SATOSHI
OKUBO NORIO
Application Number:
JP2002152862A
Publication Date:
December 05, 2003
Filing Date:
May 27, 2002
Export Citation:
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Assignee:
FURUKAWA ELECTRIC CO LTD
International Classes:
H01L21/301; H01S5/02; (IPC1-7): H01L21/301; H01S5/02
Attorney, Agent or Firm:
Hiroaki Sakai