Title:
APPARATUS FOR TRANSFERRING SUBSTRATE IN OVEN
Document Type and Number:
Japanese Patent JP2003332365
Kind Code:
A
Abstract:
To develop a phase unit which can be easily set, when various type substrate is treated so as to automatically treat to a considerable degree, even for a small lot.
In an apparatus (4) for transferring the substrate (2) in an oven (3), the oven (3) has a passage (9) formed of a floor (10) and two side faces (11, 12). The substrate (2) is transferred in the passage (9) in a transfer direction (x'). The floor (10) of the passage (9) has a recess (13) for receiving a rail (14) and is provided along one side face (11) to guide to a moving direction (x'). The rail (14) is set to receive at least one substrate (2), and the apparatus (4) has a drive mechanism for moving the rail (14) in the transfer direction (x').
Inventors:
SCHMID RETO
SUTER GUIDO
SUTER GUIDO
Application Number:
JP2003090231A
Publication Date:
November 21, 2003
Filing Date:
March 28, 2003
Export Citation:
Assignee:
ESEC TRADING SA
International Classes:
B23K1/008; H01L21/50; H01L21/52; H01L21/677; H05K3/34; (IPC1-7): H01L21/52; B23K1/008; H01L21/50; H05K3/34
Attorney, Agent or Firm:
Kichi Toshio Kawa
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