| Document |
Document Title |
|
JP5908335B2 |
|
|
JP5908422B2 |
According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a burying insulating film formed at the sides of the first electrode, and a second electrode opposed to the first electrode, having e...
|
|
JP2016063078A |
To provide a variable capacity element ensuring a large capacity change by a small stroke, with less axis shake.In a variable capacity element including a dielectric layer having two opposite principal surfaces, a first electrode consist...
|
|
JP2016063080A |
To provide a variable capacity element ensuring a large capacity change by a small stroke, with less lateral axis blur.A variable capacity element includes a dielectric layer 31 having two opposite principal surfaces, and having irregula...
|
|
JP2016063082A |
To provide a variable capacity element ensuring a large capacity change by a small stroke, with less lateral axis blur.A variable capacity element having a capacitance changing by a load to be applied includes a dielectric layer having t...
|
|
JP2016055409A |
To provide a method for controlling an MEMS (Micro Electro Mechanical Systems)variable capacitor, enabling a desired capacitance to be obtained.A method related to an embodiment is a method for controlling an MEMS variable capacitor whic...
|
|
JP2016058695A |
To provide an electronic device capable of evaluating the performance of a variable capacitor accurately in a short time.An electronic device includes a variable capacitor 10 having first and second electrodes, and indicating a first sta...
|
|
JP5895722B2 |
|
|
JP5884825B2 |
An electric device includes a dielectric substrate, a high frequency signal line formed on the surface of the dielectric substrate, a ground conductor facing the high frequency signal line through at least part of the thickness of the di...
|
|
JP5881635B2 |
|
|
JP5869694B2 |
|
|
JP5842929B2 |
An electronic device includes a substrate; an element configured to be formed on the substrate; a sidewall member configured to enclose the element on the substrate; a cover member configured to be disposed on the sidewall member, and to...
|
|
JP5844169B2 |
A rotary capacitor (11) which changes electrostatic capacity by changing a mutually opposite area of a pair of electrodes (13;14) which opposes each other, includes a rotary shaft (12) which can rotate around a central axis (C), wherein ...
|
|
JP5839040B2 |
|
|
JP2015223689A |
To suppress an increase of a defective element due to the occurrence of a dome crack.An electronic component using an MEMS element includes: an insulation layer 20 disposed on a substrate 10 having a functional element; the MEMS element ...
|
|
JP2015535393A |
The MEMS fixed condenser (1) includes a lower metal electrode (3) formed on a substrate (S), an upper metal electrode (2) supported by a metal support (5) on the lower metal electrode, and the upper portion. It contains a gas-containing ...
|
|
JP5831905B2 |
|
|
JP2015208823A |
To provide electronic equipment having a MEMS element which is covered with a lamination film having good characteristic.The electronic equipment according to an embodiment comprises: a MEMS element 20 formed on a ground region 10; and a...
|
|
JP2015211102A |
To provide an electronic device capable of suppressing adverse effect on the switching operation of a variable capacitor.An electronic device includes at least one variable capacitor 10a including a first electrode and a second electrode...
|
|
JP5821967B2 |
A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cav...
|
|
JP2015188119A |
To provide a vacuum capacitor with increased field strength, but without overheating problems, and cooling requirements corresponding to the overheating problems.A vacuum capacitor (8) includes at least two electrodes (1 and 2) in a vacu...
|
|
JP5801475B2 |
|
|
JP2015176877A |
To provide a MEMS device capable of achieving variable capacitance having a large capacitance without changing an electrode area of each MEMS element.A MEMS device according to an embodiment includes: a first variable capacitor 10 includ...
|
|
JP2015173207A |
To provide an MEMS device capable of achieving a precise variable capacitor by preventing variation in capacitance.The MEMS device includes: a bottom electrode 12; a movable upper electrode 14 which has a part facing the bottom electrode...
|
|
JP5784513B2 |
|
|
JP2015152416A |
To provide a capacitance detection device capable of properly compensating temperature.A capacitance detection device includes: a switched capacitor amplifier 10 which includes a variable capacitor 12, and a reference capacitor 13; and v...
|
|
JP2015521792A |
The present invention generally relates to a method for increasing the life of a MEMS device by reducing the number of movements of the switching element in the MEMS device. The switching elements can remain in the same state if both cyc...
|
|
JP2015122409A |
To provide a variable capacitor that allows increasing the variable range of adjustable capacitance while reducing the range of change in the capacitance according to change in a rotational angle of the variable capacitor.A variable capa...
|
|
JP5726930B2 |
|
|
JPWO2013108705A1 |
To provide a minute movable mechanism having a large variable range and a variable capacitance capacitor. The micro movable mechanism 1 of the present invention has a first movable portion 20 arranged at a distance from a fixed portion 1...
|
|
JP5714901B2 |
A mechanical drive system for a vacuum capacitor is provided and includes a drive screw and a nut, wherein the nut is arranged in a housing of the vacuum capacitor, wherein the drive screw is screwed through the nut, wherein a first elec...
|
|
JP2015088559A |
To provide a technique which improves accuracy of capacity variation due to external force in a variable capacity structure of which the capacity is varied by using flexure of a flexible tabular body due to the action of external force.I...
|
|
JP2015079860A |
To provide a variable capacitance device capable of digitally controlling capacitance.The variable capacitance device includes: (A) N (N is an integer of 2 or more) variable capacitance elements connected in series; (B) (N+1) bias lines ...
|
|
JP2015056620A |
To provide an electronic device including a variable capacitor capable of suppressing oxidation of an electrode surface.The electronic device according to an embodiment includes: a substrate 11; a fixed first electrode 13a provided above...
|
|
JP2015053513A |
To improve an average service life and minimize the number of required parts while increasing an allowable change speed between different capacitance values of a variable capacity vacuum capacitor.The mechanical drive system for vacuum c...
|
|
JP2015050325A |
To provide a digital variable capacitance MEMS device capable of increasing a variable capacitance ratio without needing a high drive voltage and without needing a large space in a device.Each of a first electrode 21, a second electrode ...
|
|
JP5677551B2 |
|
|
JP2015016554A |
To use a large number of small MEMS devices to replace a function of a larger MEMS device or digital variable capacitor.A large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller siz...
|
|
JP5660216B2 |
In a thin film device including a thin film electrode which has a main electrode layer formed of tungsten, a thin film electrode having a low resistivity is realized. There is provided a thin film device (1) including a thin film electro...
|
|
JP5644938B2 |
An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory al...
|
|
JP5639703B2 |
|
|
JP2014212159A |
To provide a variable capacitance capacitor that allows preventing a capacitance variation due to input of an AC input signal.A variable capacitance capacitor includes a first capacitor electrode part, a second capacitor electrode part d...
|
|
JP5619998B2 |
To provide a variable capacitor capable of being driven at a low voltage and yielding a stable capacitance while reducing ripple. The variable capacitor includes a plurality of variable capacitor elements connected in parallel with one a...
|
|
JP2014205235A |
To provide a functional device capable of integrating an integrated circuit substrate, a micro-machine, and a LTCC substrate to serve as a cover, or the like, on a wafer level, and a manufacturing method for the functional device.A funct...
|
|
JP2014200857A |
To provide an MEMS device in which penetration of sealing material through open holes mounted in a cap layer that covers a movable electrode and a beam part can be suppressed, and a yield rate and reliability can be improved.An MEMS devi...
|
|
JP2014203844A |
To provide a MEMS device having excellent characteristics in a variable capacitance capacitor, a switch or the like.A MEMS device includes: a first electrode 21 provided on a support substrate 10; a second electrode 22 disposed to face t...
|
|
JP2014204214A |
To provide a thin film device that has a low resistivity of a thin film electrode and a small membrane stress of the thin film electrode in spite of having the thin film electrode comprising a laminate of a tungsten nitride film and a tu...
|
|
JP2014184513A |
To provide an electric component improved in reliability.The electric component includes: a substrate 100; a functional element 120 formed on the substrate; a first layer 109 forming a cavity 130 for storing the functional element on the...
|
|
JP2014184536A |
To provide an electric component including an MEMS device having a structure with desired characteristics.An electric component as an embodiment includes a substrate and an MEMS device provided on the circuit board. The MEMS device inclu...
|
|
JP2014183303A |
To provide a variable capacitor which is voltage-increased, micro-miniaturized, heat-resistance-improved and capacity-increased.The high voltage variable capacitor comprises a rotary shaft and is configured to vary an electrode area, and...
|
