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WO/2015/163307A1 |
In order to measure the shift in alignment between an upper layer pattern and a lower layer pattern with high accuracy by scanning with an electron beam, an electron beam is scanned over an area that includes first and second patterns on...
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WO/2015/159705A1 |
Provided is a charged particle beam device capable of identifying the position of an initial core at a high accuracy even in a fine line and space pattern formed using SADP multiple times. The charged particle beam device has: a detector...
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WO/2015/152483A1 |
The present invention relates to a graphene analysis method and, more particularly, to a technique regarding a method for accurately measuring and determining, on the basis of the number of layers, the thickness of graphene having an ult...
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WO/2015/133005A1 |
A detection wave from a transmitting/receiving means is guided to the interior of a shaft furnace via an antenna and a reflecting plate, and when a reflected wave from the surface of a charging material is reflected by the reflecting pla...
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WO/2015/125504A1 |
In order to provide a pattern-measuring device and a computer program that quantitatively evaluate the effects brought about by the presence of pattern deformations in a circuit, this invention proposes a pattern-measuring device that me...
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WO/2015/125395A1 |
One embodiment of the disclosed X-ray inspection system (10) comprises an X-ray inspection device (100) and a control device (200). The control device (200) has the following: a transformation-function storage unit that stores a mapping ...
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WO/2015/125178A1 |
The purpose of this invention is to provide an X-ray thickness gauge in which, using a simple configuration, measurement error due to temperature drift in the amount of radiation delivered by said X-ray thickness gauge after thickness ca...
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WO/2015/118997A1 |
Provided is a quality management system in a surface mounting line, the system performing: a solder printing step in which a solder is printed onto a printed board by a solder printing device; a mounting step in which an electronic compo...
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WO/2015/115152A1 |
Provided is a location control system which configures an injection-withdrawal system whereby it is possible, with respect to a subject site in a body, to inject a fluid such as an anticancer agent and withdraw a fluid such as a cytoplas...
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WO/2015/112444A1 |
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-...
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WO/2015/106304A1 |
An arrangement (405) for measuring the poise of a handheld power tool (200) is provided. The arrangement (405) comprises a distance measuring means (310) adapted for measuring a distance from the handheld power tool (200) to a working su...
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WO/2015/098350A1 |
The purpose of the present invention is to provide a pattern measurement device which adequately evaluates a pattern formed by means of a patterning method for forming a pattern that is not in a photomask. In order to fulfil said purpose...
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WO/2015/098349A1 |
The purpose of the present invention is to provide a pattern measurement device for quantitatively evaluating a pattern formed using a directed self-assembly (DSA) method with high accuracy. The present invention is a pattern measurement...
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WO/2015/083675A1 |
The present invention is: a pattern measurement device that, regardless of increased fineness, deviation, or the like of a pattern, accurately and stably performs a measurement on the basis of an edge identification or a pattern or edge ...
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WO/2015/072424A1 |
An apparatus for assessing voids in solder comprises: a function calculation unit that processes the pixels constituting an image of the interior of a piece of solder such that the pixels in the voids have a pixel value pi of 1 and the p...
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WO/2015/072609A1 |
The present invention relates to a three-dimensional measuring method for a porous geopolymer using electronic tomography, and more specifically relates to a three-dimensional measuring method for a porous geopolymer using electronic tom...
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WO/2015/065843A1 |
A method of measuring an object having associated geometric data and material data. The method comprises receiving the geometric data and material data relating to the object, and comprises controlling an x-ray device to scan the object....
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WO/2015/045498A1 |
The scanning charged particle beam microscope according to the present invention is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled...
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WO/2015/046668A1 |
In performing an X-ray CT scan on a specimen, the volume which each constituent medium accounts for, that is, the volume ratio of the constituent medium mixed in a mixel can be calculated for the corresponding mixel, in which the constit...
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WO/2015/014545A1 |
The object detector comprises a body with at least one dielectric region having a flat side extending flat, and at least one wave source supplying the dielectric region with electromagnetic waves. The object detector furthermore comprise...
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WO/2015/011974A1 |
In order to reliably detect hole patterns and carry out pattern measurement even under the influence of noise, distortion, and surrounding patterns in an image in which concentrated patterns having a regular arrangement are imaged, an im...
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WO/2015/004897A1 |
This object detection system is provided with: a reader waveguide (101) constituted by an open transmission line; an RFID tag (102) situated above the reader waveguide (101); a signal strength acquisition unit (103) for acquiring the sig...
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WO/2015/001918A1 |
A displacement measurement method and device for measuring the thickness of a target substance relative to a dielectric material which does not transmit visible light, and the height and the depth of defects and foreign objects in the su...
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WO/2014/208257A1 |
An objective of the present invention is to provide a measurement device whereby it is possible to easily reuse an identification screen which has been used in carrying out pattern matching in the past. A measurement device according to ...
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WO/2014/205112A1 |
Apparatus, methods and systems for obtaining one or more dimensions of an object employing, at least in part, touch sensors.
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WO/2014/204628A1 |
A method of measuring an object registers the object with a model of the object, and determines at least one feature of the object to scan. Next, the method controls an X-ray scanning device to scan less than the entirety of the object t...
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WO/2014/205274A1 |
Metrology targets, design files, and design and production methods thereof are provided. The metrology targets are hybrid in that they comprise at least one imaging target structure configured to be measurable by imaging and at least one...
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WO/2014/199820A1 |
The present invention pertains to a method and device for quantitatively evaluating the degree and characteristics of wiggling, which is a phenomenon that occurs in electronic device fabrication processes and consists of the deformation ...
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WO/2014/181478A1 |
Provided is a device capable of avoiding reduced detection accuracy, and a manufacturing method of a structure. This detection device (1), which irradiates a subject (S) with X-rays and detects the X-rays transmitting through the subject...
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WO/2014/171350A1 |
Provided is a method for measuring an overlay in a region, in which a circuit pattern with variations in the size of the pattern of an actual device is formed, with high accuracy in the manufacture of a semiconductor device. A measuring ...
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WO/2014/155557A1 |
This sample measurement device is provided with: an irradiation source for irradiation with an electron beam; a scanning system for scanning a measurement area with the electron beam; a memory for storing simulation-calculated intensity ...
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WO/2014/156262A1 |
In order to reduce the amount of time it takes to collect images of defects, this defect inspection device is provided with the following: a read-out unit that reads out positions of defects in a semiconductor wafer that have already bee...
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WO/2014/135429A1 |
The invention relates to an x-ray fluorescence analysis device, comprising an x-ray source (10) for irradiating a sample (15) with x-radiation (19), an x-ray detector (17) for measuring x-ray fluorescence radiation (16) emitted by the sa...
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WO/2014/136194A1 |
An x-ray nondestructive testing device for: irradiating, with x-rays, an article which is created on the basis of stored design information and is equipped with a substrate having a known x-ray absorption coefficient and a member to be m...
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WO/2014/128874A1 |
[Abstract] A diffraction ring forming device that is provided with a case (100) that incorporates an X-ray emitter for irradiating an object to be measured with X-rays and an imaging plate for recording a diffraction ring. The case (100)...
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WO/2014/126586A1 |
A versatile beam scanner for generating a far-field scanned pencil beam, and, alternatively, a far-field pencil beam. An angle selector limits the angular extent of an inner fan beam emitted by a source of penetrating radiation. The sour...
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WO/2014/118078A1 |
The invention relates to a measuring device (4) which is used to measure a surface of a measurement object. The measuring device contains a measuring apparatus (5), which is designed to send a measurement signal in the direction of the m...
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WO/2014/119509A1 |
This pattern evaluation device comprises a model estimating unit to estimate, from an inspection image, a model resulting from a manufacturing method, a deformation estimating unit to estimate the deformation of the inspection image usin...
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WO/2014/114737A2 |
The invention relates to a method for determining the geometry of a structure on an object at least by using a computer tomography sensor system comprising at least a radiation source, a mechanical axis of rotation, and a detector, prefe...
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WO/2014/114418A1 |
The invention relates to a microwave resonator for a measuring device for measuring the thickness and/or the moisture of stand-shaped fiber material (FM), which is continuously conveyed through a measurement chamber (6, 6') arranged in a...
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WO/2014/116673A1 |
Apparatus is provided featuring a signal processor or processing module configured at least to: receive signaling containing information about coded and multiplexed voltages measured across pairs of electrodes in an array of electrodes c...
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WO/2014/115740A1 |
The purpose of the present invention is to provide a method for pattern measurement and a charged particle radiation device, whereby patterns formed by DSA techniques can be measured and inspected with high accuracy. According to an aspe...
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WO/2014/112031A1 |
This X-ray diffraction measurement apparatus is provided with a casing (60), said casing (60) having accommodated therein: an X-ray emitter (10) which emits X-rays towards an object (OB) to be measured; a table (20) having an imaging pla...
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WO/2014/112030A1 |
A controller (CT) irradiates, with laser light, a diffraction-light receiver (28) on which a diffraction ring is recorded by X-rays diffracted by an object to be measured, and measures the diffraction ring. The controller (CT) calculates...
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WO/2014/109163A1 |
This charged-particle beam device changes conditions for combining an intensity ratio between upper and lower deflectors and rotation angles of the deflectors in multiple ways when obtaining images having different pixel sizes in the ver...
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WO/2014/102919A1 |
The purpose of the present invention is to provide a system and a method capable of non-destructively evaluating the state of a processed surface of an object to be measured, even for aggregate structures and coarse crystalline materials...
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WO/2014/101598A1 |
Disclosed are a method for extracting shape features, a method and device for security inspection. A three-dimensional structure of an object is acquired by utilizing a CT (S42). Symmetric metric values of multiple depth projection image...
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WO/2014/104055A1 |
The purpose of the present invention is to estimate and evaluate the cross-sectional shape or three-dimensional shape of a circuit pattern only from a planar image of the circuit pattern as observed from above a wafer. This pattern shape...
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WO/2014/076974A1 |
A diffraction ring forming device comprises an x-ray emitter (10) for emitting x-rays toward an object to be measured (OB), a table (16) in which a through-hole through which the x-rays can pass is formed in the center, and an imaging pl...
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WO/2014/077303A1 |
An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed ...
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