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WO/2015/052763A1 |
This substrate transfer device (100) is provided with: a conveyor part (1) for transporting a substrate (CB) along a transportation direction and a first guide rail (2) and a second guide rail (3) provided so that a space is present ther...
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WO/2015/042304A1 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carri...
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WO/2015/042302A1 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carri...
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WO/2015/042309A1 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carri...
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WO/2015/040915A1 |
This transport-in/transport-out apparatus (100) is provided with a carrier stage (2) having protruding parts (3, 4) used to position a transported object (1), and a transfer robot (50) for transporting the transported object (1) into and...
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WO/2015/037701A1 |
Provided is an industrial robot that enables a hand to be properly operated when conveying a high-temperature object to be conveyed in a vacuum even when the arm comprises multiple arm sections that are connected together in a rotatable ...
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WO/2015/037702A1 |
Provided is an industrial robot that has a reduction gear assembly at each joint section and that can be overhauled easily and at a low cost. This industrial robot is equipped with: a distal arm section (21) to which a hand (4) is rotata...
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WO/2015/036978A1 |
A machine (1) for application of paint (V) by means of electrophoresis on metal crown caps (2), comprising an inlet conveyor (3) for providing metal crown caps (2) in a vertical orientation; a tub (4) containing paint (V) for at least pa...
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WO/2015/033439A1 |
The present invention is provided with: a boat such that a plurality of substrate plates each having a mounting surface extending in the vertical direction are arrayed along the direction of the normal line of the mounting surfaces; a co...
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WO/2015/033520A1 |
In front (9) of an oblong wall plate (5) erected in a vertical orientation state, this air conveyer (1) conveys a glass plate (2) in a vertical orientation in a straight line parallel to the wall plate (5). In this air conveyer (1), a sp...
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WO/2015/032111A1 |
A mechanical arm fork (200) comprises a plurality of rigid structural bodies (210), wherein two adjacent rigid structural bodies (210) are connected through an elastic structural body (220). A mechanical arm is used for conveying a glass...
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WO/2015/033442A1 |
The present invention is provided with: a sample holder having a substrate plate at a primary surface of which a substrate mounting region at which a substrate is to be mounted has been defined; a substrate moving device that has a subst...
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WO/2015/031981A1 |
An elevation conveyance system for transporting a payload substantially vertically and transversely to a preselected release location. The system includes a track assembly comprising a substantially vertical track, one or more bin assemb...
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WO/2015/029669A1 |
When cutting (fracturing) thin sheet glass formed in an elongated band while conveying same in the lengthwise direction thereof, provided are a method for conveying and device for conveying thin sheet glass that are able to stably cut (f...
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WO/2015/029806A1 |
A processing apparatus of a stack is provided. The stack includes two substrates attached to each other with a gap provided between their end portions. The processing apparatus includes a fixing mechanism that fixes part of the stack, a ...
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WO/2015/025784A1 |
Provided is a levitation transportation device having simple pipework for discharging compressed gas from a conveyance surface. A plurality of discharge ports (301) are formed on the conveying surface (300) of an inward/outward conveying...
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WO/2015/020891A1 |
Methods provide for post processing at least one flexible glass sheet with the step of providing the glass sheet with an initial shape. The method then further includes the step of flexing the glass sheet into a secondary shape from the ...
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WO/2015/020089A1 |
Provided is a horizontal multi-joint robot that has an arm that moves in the horizontal direction and that can be installed so that a hand moves accurately in the horizontal direction with ease in a relatively short amount of time. The h...
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WO/2015/020088A1 |
Provided is an industrial robot for conveying semiconductor wafers between a plurality of FOUPs arranged in a fixed direction and a semiconductor wafer processing device, the robot constituting a part of an EFEM, wherein the size of the ...
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WO/2015/019864A1 |
Provided is a technology that eases stress imparted to an object by a gas flow. This supporting air plate has a support surface, forms a compressed gas layer between the support surface and a supported object, and supports the supported ...
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WO/2015/019868A1 |
A sheet member conveyance device is provided with a support means that supports a sheet member and a movement means that transports the sheet member by causing the support member to move. The support means supports one end section and an...
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WO/2015/014410A1 |
A holding arrangement (10) for holding a substrate (20) during vacuum layer deposition is provided. The holding arrangement (10) includes a frame (30) configured to support the substrate (20), and one or more holding devices (40) attache...
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WO/2015/014411A1 |
A holding arrangement (10) for holding a substrate (20) during vacuum layer deposition is provided. The holding arrangement (10) includes a frame (30) having two or more frame elements (31, 32, 33, 34), the frame elements (31, 32, 33, 34...
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WO/2015/015995A1 |
Provided are: a transport cart used when delivering goods, such as materials, containers, and products, between local zones maintaining a high degree of cleanliness formed by locally providing a plurality of zones having a high degree of...
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WO/2015/013143A1 |
Embodiments of the present invention provide an end effector capable of generating an electrostatic chucking force to chuck a substrate disposed therein without damaging the substrate. In one embodiment, an end effector for a robot, the ...
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WO/2015/013425A1 |
A vertical load weighing system and method are provided. The system includes a rail and a plurality of trucks slidable on the rail. The plurality of trucks support a saddle that carries a portion of a machine. A load measuring means is s...
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WO/2015/010043A1 |
A mass transit system. The system comprises a first platform for supporting a cargo compartment, a rotating platform having a center area, and a conveyor system for moving the cargo compartment from the first platform to the center area ...
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WO/2015/008539A1 |
Provided is a contactless conveyance device and the like that is capable of stable and contactless conveyance and that prevents defective conveyance of a thin conveyed object. The contactless conveyance device (1) is such that a pluralit...
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WO/2015/006988A1 |
Provided is a glass substrate positioning apparatus. The apparatus comprises a supporting seat (2) for supporting a glass substrate (10), and comprises a pair of first positioning mechanisms (3), a pair of second positioning mechanisms (...
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WO/2015/005549A1 |
The present invention relates to a transferring tool and, more particularly, to a transferring tool, and a linking member and a picker of the transferring tool, the transferring tool comprising a picker for picking up a device by vacuum ...
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WO/2015/000190A1 |
A cartridge at least comprises a plurality of vertical columns (10) disposed on lateral sides and a bottom frame (13). The plurality of vertical columns (10) extends into the cartridge to form a plurality of supporting columns (11), a su...
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WO/2015/000192A1 |
An air floatation guide wheel conveyer (100) for liquid crystal panels, being used to guide and convey a liquid crystal panel (2), and comprising an air floatation support platform (10), two guide wheel sets (11) and a magnetic wheel dri...
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WO/2015/000274A1 |
Disclosed are a carrying device and a carrying method, the carrying device comprising: at least one of a transport device (4) for transporting the packing bin and an adjustment device (5) for adjusting the transport device (4) to enable ...
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WO/2014/210061A1 |
A smart carrier has a housing comprising one or more docking locations configured to accept a secure receptacle, a wireless interface module disposed within the housing, and a processor disposed within the housing and operatively coupled...
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WO/2014/201725A1 |
Disclosed is a conveying device (100) for a glass substrate (500). The conveying device (100) for the glass substrate (500) comprises a bearing platform (200) and an air flotation system (300), wherein the bearing platform (200) is used ...
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WO/2014/201699A1 |
Disclosed are a glass panel stacking system and a stacking method. The stacking system comprises a picking and placing port and a manipulator (20), wherein the picking and placing port is used for placing a cassette (40) equipped with gl...
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WO/2014/200927A1 |
Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The ...
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WO/2014/190834A1 |
A workpiece conveying apparatus is used for connecting a workpiece supplying apparatus (24) and a workpiece processing apparatus (25). The workpiece conveying apparatus comprises: support components (5, 7, 16), disposed between the workp...
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WO/2014/187001A1 |
A liquid crystal display substrate carrying apparatus and a using method therefor. The carrying apparatus is used for carrying a liquid crystal display substrate (10). The carrying apparatus comprises a fixation arm (1); at least two for...
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WO/2014/180133A1 |
A mechanical arm device (1) is used to manufacture displays. The device can avoid the impact on the display picture quality in the process of transferring substrates. The mechanical arm device (1) comprises a device body (10), a mechanic...
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WO/2014/181855A1 |
[Problem] To provide: a glass film manufacturing method that enables a glass film to be easily and inexpensively peeled from a support glass, even in manufacturing-related post-processing involving the application of heat; and an electro...
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WO/2014/181715A1 |
Provided is a technology that eases stress on a subject resulting from gas flow. This supporting air plate has a supporting surface, a compressed gas layer is formed between the supporting surface and a supported subject, and the support...
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WO/2014/178698A1 |
The invention relates to a system and method for painting items, preferably, but not necessarily, made from glass, e.g. bottles, to which a coat of paint is applied, except on one or more selected surfaces which are covered with one or m...
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WO/2014/178699A1 |
The invention relates to a system and method for painting items, preferably, but not necessarily, made from glass, e.g. bottles, to which a coat of paint is applied, except on one or more selected surfaces which are covered with one or m...
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WO/2014/179422A1 |
Methods of conveying a glass ribbon are provided that each includes the step of conveying the glass ribbon over a support device with a cushion of fluid supporting the glass ribbon over the support device. Each method further includes th...
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WO/2014/179557A1 |
A device for palletizing a plurality of articles and for stabilizing selected ones of the plurality of articles is provided. The device includes at least one load stabilizer and at least one stabilizer applier. The at least one load stab...
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WO/2014/163776A1 |
Embodiments described herein generally relate to a dynamic load lock chamber that is adapted to transfer one or more substrates from a first region that is at first pressure to a second region that is at a second pressure. More specifica...
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WO/2014/165406A1 |
A wafer transfer assembly and method of using the assembly to transfer device wafers between processing tools in a manufacturing process are described herein. The assembly comprises a wafer transfer disk, an end effector configured to re...
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WO/2014/153873A1 |
Disclosed are a roller for glass substrate transmission and a device for glass substrate transmission. The roller (1) comprises a cylindrical body (10) and an outer layer (11) coated on the side surface of the cylindrical body (10). The ...
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WO/2014/158788A1 |
A method of automatically mounting a sheet from a cutting table onto a spacer frame of an insulating glass unit begins with identifying a position and orientation of a specified sheet on the cutting table and moving a robotic sheet picku...
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