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JPH081519Y2 |
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JPH07115315B2 |
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JPH07107913B2 |
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JPH0795115B2 |
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JPH0792518B2 |
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JPH07251395A |
PURPOSE: To transmit torque from the outside of an isolated room to an operating shaft of an instrument provided in the isolated room isolated as a vacuum room. CONSTITUTION: An operating shaft 7 to drive an instrument provided in an iso...
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JPH0783990B2 |
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JPH0739576Y2 |
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JPH0774361B2 |
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JPH0769462B2 |
A transparent panel (1) for shielding against harmful radiation consists of a sheet (2) transparent to visible light and which contains lead (Pb) in sufficient amount to stop radioactive radiation (e.g. of an acrylic resin or lead glass)...
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JPH07506294A |
An environmental chamber comprising a transparent dome shaped housing having an annular conduit, including an exhaust port, affixed to the base of the housing. The housing securely fits over an end of a chemical container, to create a co...
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JPH0755464B2 |
The invention is related to a robot apparatus with a motor chamber (53), a first set of magnets (517) disposed in the motor chamber for movement about a common axis, a second set of magnets (522) disposed in the motor chamber for movemen...
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JPH0756879B2 |
In semiconductor production plants a highly clean state is required. In a plant building, through which air is forcibly circulated, a clean room (12) in a low or medium cleanliness state is formed using a filter (17). A plurality of proc...
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JPH0719733Y2 |
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JPH07112395A |
PURPOSE: To perform transmission of a stable magnetic coupling force by a method wherein a conveying bed for a wafer is supported by a guide element, such as roll bearings and a plurality of pairs of power transmission elements wherein m...
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JPH0769406A |
PURPOSE: To enable the presence or absence of a wafer on a hand to be sensed outside a chamber regardless of the position of the hand, so as to shorten the conveyance time by receiving an optical signal corresponding to detection of a se...
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JPH075997Y2 |
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JPH0732289A |
PURPOSE: To provide a vacuum working chamber wherein a miniature drive device is assembled in a chamber. CONSTITUTION: A piston block 20 having a permanent magnet 21 is housed in a nonmagnetic-material-made air cylinder 12 to engage an a...
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JPH074146Y2 |
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JPH071270Y2 |
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JPH06347592A |
PURPOSE: To ventilate inside a glove box without scattering radioactive material powder by constituting so as to supply gas for ventilation from the top of the glove box and discharge the gas in the box from the bottom of the box. CONSTI...
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JPH0641826Y2 |
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JPH0672975U |
[Purpose] Provided is a small and maintenance-free in-vacuum jig moving device. [Constitution] A guide shaft 6 is provided in the vacuum chamber, a slider 8 is slidably provided on the guide shaft, a screw rod 10 is rotatably provided pa...
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JPH0671090U |
[Purpose] It is an object of the present invention to provide a manipulator slave tong in a slave tong of a manipulator device, in which it is not necessary to replace the entire slave tong as in the conventional case even if the rubber ...
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JPH0637359Y2 |
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JPH0671041B2 |
A transferring apparatus comprises a vacuum chamber, a carrier member disposed inside a pipe which communicates with the vacuum chamber, magnetic means installed in a support structure which is moved by a driving means. The carrier membe...
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JPH0632639Y2 |
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JPH0631439Y2 |
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JPH06216060A |
PURPOSE: To enable a work to be smoothly transferred and prevented from being contaminated with particles by a method wherein ions and electrons are fed into a vacuum atmosphere to neutralize the electrical charge of a work. CONSTITUTION...
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JPH06204316A |
PURPOSE: To suppress the deterioration in positional accuracy of a hand part due to thermal strain and thermal deformation by a method wherein the heat conduction from the material to be dried is suppressed by providing radiant-heat refl...
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JPH0653087U |
[Purpose] The front door of the gas cylinder box that houses the gas cylinder has a hole for inserting a hand, and a finger is inserted into the glove hanging inside the box to operate the valve of the cinder. In the past, there was a pa...
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JPH06186392A |
PURPOSE: To reduce a construction period and contrive reduction of cost by manufacturing a plurality of unit inside frames in a factory, installing and unitizing specified devices and transporting them to a site and connecting thereto. C...
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JPH0644073B2 |
A glove box having an air admission device (6) and an air exhaust device. The air admission advice (6) includes a moving mechanism (60, 76) of which at least a portion is situated inside of the valve body (44), this moving mechanism acti...
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JPH06130184A |
PURPOSE: To provide a method enabling minimizing the work for construction at placing site and inspection. CONSTITUTION: The method is constituted of a process to construct a glove box main body 11 formed with columns and beams at the pl...
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JPH0616695Y2 |
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JPH0630855B2 |
The present invention relates to a process for introducing a robot (5) intended for carrying out inspection and maintenance operations within nuclear installations, particularly in pressurized-water reactor vessels (1). This robot (5) is...
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JPH0666995A |
PURPOSE: To prevent exposing of radioactive-contaminated part out of a glove box during replacing a window structure by welding an outer cylinder on the side wall of the glove box and inserting a replacing jig having such a transparent p...
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JPH0618231B2 |
An automated cassette handler (300) is disclosed for transporting a cassette containing integrated circuit wafers (20) between first and second elevators (50,60) in a standardized mechanical interface (SMIF) system for integrated circuit...
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JPH067908Y2 |
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JPH067909Y2 |
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JPH068188A |
PURPOSE: To manipulate loads within a tight enclosure with an operator remaining outside the enclosure. CONSTITUTION: This lifting device is basically made up of a main arm 11 fitted so as to slide inside the opening 4 of a wall 5 surrou...
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JPH05305596A |
PURPOSE: To extend the operating range of a robot arm and improve the durabil ity of a driving means. CONSTITUTION: A robot arm R is constituted so that a series of hollow link members 1-6 are mutually continued in such a manner as to be...
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JPH0585584U |
[Purpose] The operating range of the robot arm is widened, the durability of the driving means is improved, and the manufacturing cost is reduced. [Constitution] The robot arm R is connected in a series by hollow first to sixth link memb...
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JPH05269690A |
PURPOSE: To easily change gloves to protect hands. CONSTITUTION: A glove holder which is assembled for a working glove 15 located in the holder to protect hands, and has a sleeve 11 to protect arm and a forearm, includes a means 49 to lo...
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JPH0556858B2 |
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JPH05203469A |
PURPOSE:To obtain a highly accurate analyzed result from the title instrument in a short time. CONSTITUTION:After designating the measuring locations and measuring method of the temperature of an object in an interactive form, the temper...
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JPH05186010A |
PURPOSE: To provide a system by which objects or members are exchanged between a robot of a robotic system and the exterior of the system. CONSTITUTION: This system has a transfer bay 30 through which objects can be exchanged between a r...
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JPH0549294U |
[Constitution] A glove box characterized in that a sealed inner box made of a transparent synthetic resin plate having a gas outflow port is installed inside a sealed outer box made of a transparent synthetic resin plate having a gas out...
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JPH05158399A |
PURPOSE: To provide the simulator which is superior in mobility by carrying a simulation box with the arm of a vertical articulation six-axial robot. CONSTITUTION: This simulator consists of the simulation box 10 on which a person can be...
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JPH0547897U |
[Purpose] Obtain a box structure of a glove box that is not deformed during assembly manufacturing. [Constitution] A plurality of box structures are formed of a top pan 2A and a bottom pan 2B, a panel frame 4 attached to the front and re...
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