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WO/2003/018252A2 |
The present invention provides a process and liquid composition for selectively removing a metal film from a patterned substrate. The process, which is useful in the manufacture of semiconductor devices and circuits, comprises chemically...
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WO/2003/011520A1 |
Disclosed is a method for forming micro-holes, perforated holes, or grooves on a chemical mechanical polishing pad by a laser. This method involves the steps of determining a pattern of micro-holes, grooves, or perforated holes to be for...
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WO/2003/011522A1 |
Disclosed is a method for forming micro-holes, perforated holes, and/or grooves on a polishing pad using a laser beam and a mask. This method involves the steps of determining a pattern of micro-holes, grooves, and/or perforated holes to...
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WO/2003/011479A1 |
The present invention provides a process for forming inlaid patterns of metal into specified areas of a patterned substrate. The process, which is useful in the manufacture of semiconductor devices and circuits, comprises selectively rem...
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WO/2003/008151A1 |
Described are fixed abrasive articles including wear indicators. Exemplary abrasive article (2) comprising abrasive composite elements (4) in the form of posts. The abrasive composite elements (4) include a binder and abrasive particles ...
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WO/2003/000976A1 |
There is disclosed a nonwoven fabric in which a substantial proportion of the fibres are fibres with a length of from 0.1 to 12 mm composed of homogenous or heterogeneous, or mixed waste materials of small particle size and the proportio...
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WO2001074537A9 |
Methods and apparatus are provided for combining the manufacturing of a fixed-abrasive substrate and the chemical mechanical planarization of semiconductor wafers using a single process path (26). An electrostatic patterning device (58) ...
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WO/2002/100593A2 |
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion ...
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WO/2002/100595A1 |
A polishing sheet (10) not deforming with elapse of time in use and capable of uniformly flattening a polished surface at a high polishing rate and a method of manufacturing the sheet&semi the polishing sheet (10), comprising a fabric sh...
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WO2001092620A9 |
A method of forming a nonwoven fabric suitable for metal-finishing buffing operations includes providing a precursor web comprising polyester, staple length fibers, with hydroentanglement of the web effected to impart desired physical ch...
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WO/2002/094508A1 |
A contactor cleaning sheet (10) capable of concurrently cleaning the tip and side faces of a contactor (22) by using one sheet of the cleaning sheet (10), comprising a base sheet (11), a first polishing layer (12) formed on the surface o...
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WO/2002/092286A1 |
An abrasive film capable of finish-polishing to a smooth surface with no unpolished area; and a method of producing the same. An abrasive film prepared by forming an abrasive layer (5) on the surface of a plastic film (1). The abrasive l...
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WO/2002/090054A2 |
A contactor cleaning sheet capable of concurrently cleaning the tip and side faces of a contactor, a contactor cleaning sheet manufacturing method, and a contact cleaning method; the cleaning sheet (10), comprising a base sheet (11), an ...
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WO/2002/090049A1 |
A foaming paint of foaming resin is applied onto a surface of an excipient film (11), and this foaming paint is wet-foamed so as to form a foam sheet (10) on the surface of the excipient film. The foam sheet is peeled off from the surfac...
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WO/2002/084004A2 |
Cleaning articles comprising a nonwoven web or foam, binder, and organic particles. In another aspect, the present invention provides a method for cleaning soiled surfaces utilizing cleaning articles comprising a nonwoven web or foam, bi...
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WO/2002/083395A1 |
The present invention concerns a method of producing a film material comprising the steps of creating at least a first, a second and a third mixture, leading each one of the mixtures to a co-extrusion die (1,10) and co-extruding the mixt...
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WO/2002/083364A1 |
A cleaning implement of simple construction capable of cleaning the tip and lateral surface of a contactor is provided. It comprises a base plate (11), an intermediate sheet consisting of an elastic sheet having elasticity and a plastic ...
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WO/2002/078909A1 |
An electrostatic abrasive grain deposition process can be adapted to produce a patterned abrasive surface by controlling the local intensity of the field by which the grain (5) is projected on to a substrate (3).
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WO/2002/078908A1 |
The present invention is directed to a method of abrading a surface of a workpiece. The method of the invention comprises bringing a surface of a workpiece and an abrasive article into frictional contact in the presence of an aqueous flu...
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WO/2002/076678A1 |
The present invention provides a flexible abrasive product comprised of an open cell foam backing (12), a foraminous barrier coating (13) and a shaped foraminous abrasive coating (33). The flexible abrasive article (31) of the invention ...
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WO/2002/074492A2 |
The present invention provides discrete particles (306) and methods of preparing the discrete particles (306), and abrasive articles (300) having projections attached to a major surface thereof and methods of making such articles (300). ...
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WO/2002/074839A2 |
The present invention provides abrasive articles and methods of making abrasive articles. The abrasive articles have a polymeric material that includes (1) a reaction product of components that include (a) an epoxy-functional material, (...
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WO/2002/068154A1 |
The invention provides abrasive articles with optimally oriented abrasive particles (60) and a method of making the same. The method involves contacting a substrate (61) with the contact and mating surfaces of tools to provide an embosse...
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WO/2002/064317A1 |
The invention concerns a self-adhering support (A) for an applied abrasive product, comprising a support for abrasive (1) secured to a self-adhesive sheet (1a). The invention is characterised in that said self-adhering support (A) has a ...
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WO/2002/062532A1 |
A composition useful, for example, as a coating on the backside of coated abrasive articles comprising binder precursor selected from the group consisting of acrylic, acrylate, phenolic, epoxy, melamine-formaldehyde and combinations ther...
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WO/2002/062531A1 |
An abrasive is oversized with a layer consisting essentially of an inorganic anti-loading agent selected from the group consisting of metal silicates, silicas, metal carbonates, and metal sulfates. The metal silicates can be selected fro...
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WO/2002/060648A1 |
A polishing film (10) which comprises a plastic film (11) and, formed on the surface thereof, a polishing layer (14) having a thickness of 50 $g(m)m or more and comprising 50 to 85 wt % of silica particles having been treated with heat a...
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WO/2002/055261A1 |
A polisher (1) for polishing a curved surface such as the convex surface of a spectacle lens, comprising a polishing pad (3) having water passing grooves (5) of 0.1 to 5 mm wide stuck on a dome-shaped elastic base material (2), the polis...
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WO/2002/055266A1 |
A wiping film having a flexible film backing, and a wiping layer formed on one surface of the backing, wherein the wiping layer is composed of a binder and plastic particles dispersed therein. The wiping film is useful for removing forei...
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WO/2002/053324A1 |
A method of chemically modifying a wafer suited for fabrication of semiconductor devices includes a) contacting a surface of wafer with an article (10) that includes a plurality of unit cells repeating across the surface of the article, ...
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WO/2002/051587A1 |
As one of many embodiments of the present invention, a seamless polishing apparatus for utilization in chemical mechanical polishing is provided. The seamless polishing apparatus includes a polishing pad (156) where the polishing pad (15...
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WO/2002/045906A1 |
Abrasive cloth comprising composite cloth having a fiber base material and a polymer elastic body filled in the material, characterized in that the fiber base material (1) is composed of fiber bundles each formed by bundling 20-3000 very...
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WO/2002/045908A1 |
Abrasive grinding wheels having an irregular (i.e., gapped) perimeter shape and/or holes extending therethrough permit one to view the surface of a workpiece being ground in conventional surface finishing, snagging and/or weld blending o...
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WO/2002/043536A2 |
A bi-functional nonwoven fabric wipe (10) embodying the principles of the present invention comprises a hydroentangled, composite fibrous matrix having first and second, opposite expansive surfaces. The first expansive surface of the wip...
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WO/2002/043925A1 |
A process for planarizing, polishing, or providing other modification of a wafer surface (22) or other workpiece. The process includes using an abrasive article (140) having a textured abrasive coating affixed (146) to a backing. The abr...
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WO/2002/043921A1 |
A polishing pad capable of stably performing, with a high polishing speed, the flattening processing of the materials requiring a high degree of surface flatness such as silicon wafers for semiconductor devices, magnetic disks, and optic...
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WO/2002/042034A1 |
The invention provides an abrasive product having a sheet-like backing (11) including a plurality of concavoconvex portions, the backing (1) also having a first major surface including convex portions and an opposite second major surface...
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WO2001043918A9 |
A method for making an abrasive material comprising a plurality of hard particles (75) providing the abrasive quality distributed in a retaining matrix for holding the particles in place, the method comprising the steps of placing a mask...
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WO/2002/038338A2 |
The present application discloses an agglomerate. The agglomerate comprises a crystalline matrix. The agglomerate may additionally comprise abrasive particles. The agglomerate has a normalized bulk density of less than about 0.38. The pr...
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WO/2002/032832A1 |
A method for making abrasive agglomerate particles from a composition (12) comprising at least a radiation curable binder and solid particulates. The method comprises the steps of forcing the composition through a perforated substrate (5...
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WO/2002/033019A1 |
Methods for making ceramic aggregate particles (80) comprising forming a plurality of ceramic aggregate precursor particles (20) from a composition (12) by forcing the composition through at least one orifice (21) in a substrate (22), at...
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WO/2002/033020A1 |
A method for making agglomerate particles from a composition comprising at least a radiation curable binder and solid particulates. The method comprises the steps of forcing the composition through a perforated substrate to form agglomer...
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WO/2002/032626A1 |
The invention provides coated abrasive products (10) having as a backing material a barrier-coated tear-resistant laminate (11) of fabric (12) and paper (15) overcoated on the barrier coating (17) with an abrasive coating. The coated abr...
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WO/2002/032625A2 |
The invention provides abrasive articles (30) comprising: a backing (32) having a first major surface and a second major surface; and an abrasive coating (37) consisting essentially of: a hardened binder coating having a first surface ad...
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WO/2002/031874A1 |
An abrasive cloth having an abrasive layer containing a polymer material which is hydrolyzed by an aqueous medium. The abrasive cloth is capable of exhibiting stable polishing performance for a relatively long period of time with no dres...
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WO/2002/024414A1 |
The invention relates to an abrasive body (1) for an electric grinding tool, especially a delta, eccentric or vibrating grinder, comprising a support plate (2) on which an abrasive grit (3) that can be connected to a base plate of the gr...
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WO/2002/022308A1 |
A polishing pad and method, wherein surface dressing is made unnecessary, no deformation occurs with the lapse of working time, there is no clogging otherwise caused by abrasive grains or abraded chips, and the surface of a polish-object...
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WO/2002/020218A2 |
The present invention provides an abrasive article formed of a binder, abrasive particles associated with the binder, and a lubricating particulate additive comprising polytetrafluoroethylene associated with the binder. The abrasive arti...
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WO/2002/006009A1 |
The invention concerns a cleaning tool, whereof the structure comprises a substrate to at least at one surface of which fibres have been secured by flocking, said fibres covering, at least partly, said surface and having mainly at their ...
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WO/2002/002274A2 |
The invention is directed to a base-pad (2) for placement under a polishing pad (1) for use with a polishing fluid during a polishing operation, the base-pad (2) having a layer (7) with vertical elongated pores that absorb polishing flui...
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